Growth temperature effect investigation of pulsed atomic layer epitaxy grown AlN on non-patterned silicon substrate

DEMİR İ.

International Congress on Engineering and Architecture (ENAR-2018), 14 - 16 Kasım 2018

  • Yayın Türü: Bildiri / Özet Bildiri
  • Sivas Cumhuriyet Üniversitesi Adresli: Evet